Adjustable cassette for accommodating substrates and method...

Supports: racks – Special article – Platelike

Reexamination Certificate

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Reexamination Certificate

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10605997

ABSTRACT:
An adjustable cassette (1) for accommodating substrates includes a frame (10), a pair of supporting plate (20) with a plurality of retaining members (208) facing each other, and an adjusting means for joining of the supporting plates to the frames and thereby forming the cassette. At least one supporting plate can slide away from or close to another supporting plate and be fixed by means of the adjusting means.

REFERENCES:
patent: 4936472 (1990-06-01), Meier
patent: 5490011 (1996-02-01), Pernick et al.
patent: 5577621 (1996-11-01), Yi
patent: 5584401 (1996-12-01), Yoshida
patent: 5828502 (1998-10-01), Afshari
patent: 6092981 (2000-07-01), Pfeiffer et al.
patent: 6155436 (2000-12-01), Smick et al.
patent: 6170675 (2001-01-01), Follman et al.
patent: 6523701 (2003-02-01), Yoshida et al.
patent: 7001130 (2006-02-01), Ransom

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