Adhesive sheet for wafer setting and process for producing elect

Details Adhesive sheet for wafer setting and process for producing elect Adhesive sheet for wafer setting and process for producing elect

1998-02-23

2000-03-28

Osele, Mark A.

Stock material or miscellaneous articles

Circular sheet or circular blank

Aperture containing

428157, 428212, 428213, 428354, 156344, 156584, 438464, 438976, B32B 302

Patent

active

060429224

ABSTRACT:
An adhesive sheet for wafer setting, comprising a wafer setting part composed of an expansible film and an adhesive layer for wafer setting and a marginal part outside the wafer setting part,

REFERENCES:
patent: 5705016 (1998-01-01), Senoo et al.
Japanese Publication No. 02265258, Abstract, Oct. 30, 1990, 1 p., English language.
Japanese Publication No. 05299504, Abstract, Nov. 12, 1993, 1 p., English language.

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