Adherent separator for self-defining discontinuous film

Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor

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Details

361312, 361313, 3613014, 3613215, 257303, 257306, H01G 406, H01G 420, H01G 410

Patent

active

060025751

ABSTRACT:
An adherent separator structure with a post projecting from a surface which may be a substrate, and a separator adhering to the post, the separator spaced a distance above the surface. A discontinuous film is then formed in a single process step having a first portion on the substrate and a second portion on the post, the discontinuity proximate to and caused by the separator. The structure is made into a stacked capacitor with the second (post) portion of the discontinuous film being the bottom electrode, by forming a continuous dielectric layer on the bottom electrode and a continuous top electrode layer on the dielectric layer.

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