Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Patent
1997-05-29
1999-12-14
Kincaid, Kristine
Electricity: electrical systems and devices
Electrostatic capacitors
Fixed capacitor
361312, 361313, 3613014, 3613215, 257303, 257306, H01G 406, H01G 420, H01G 410
Patent
active
060025751
ABSTRACT:
An adherent separator structure with a post projecting from a surface which may be a substrate, and a separator adhering to the post, the separator spaced a distance above the surface. A discontinuous film is then formed in a single process step having a first portion on the substrate and a second portion on the post, the discontinuity proximate to and caused by the separator. The structure is made into a stacked capacitor with the second (post) portion of the discontinuous film being the bottom electrode, by forming a continuous dielectric layer on the bottom electrode and a continuous top electrode layer on the dielectric layer.
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Kotecki David E.
Ma William H.
Anderson Jay H.
International Business Machines - Corporation
Kincaid Kristine
Mortinger Alison D.
Thomas Eric W.
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