Addressing of an SLM

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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Details

C359S290000, C359S291000, C359S223100, C359S224200

Reexamination Certificate

active

07072090

ABSTRACT:
The present invention relates to a method to reduce charging effects affecting a degree of movement of at least one movable micro mirror in a spatial light modulator, said at least one movable micro mirror is electrostatically attractable to at least one electrode, including the action of attracting electrostatically said at least one micro mirror in a sequence of reversed electrical field between said micro mirror and said at least one electrode.

REFERENCES:
patent: 5949570 (1999-09-01), Shiono et al.
patent: 6323982 (2001-11-01), Hornbeck
patent: 6600591 (2003-07-01), Anderson et al.
patent: 2005/0122558 (2005-06-01), Ljungblad

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