Addressable test matrix for measuring analog transfer characteri

Details Addressable test matrix for measuring analog transfer characteri Addressable test matrix for measuring analog transfer characteri

1985-05-13

1988-01-12

Karlsen, Ernest F.

Electricity: measuring and testing

Plural, automatically sequential tests

324158R, 324158T, 371 25, 371 21, G01R 3128

Patent

active

047194111

ABSTRACT:
A set of addressable test structures, each of which uses addressing schemes to access individual elements of the structure in a matrix, is used to test the quality of a wafer before integrated circuits produced thereon are diced, packaged and subjected to final testing. The electrical characteristic of each element is checked and compared to the electrical characteristic of all other like elements in the matrix. The effectiveness of the addressable test matrix is in readily analyzing the electrical characteristics of the test elements and in providing diagnostic information.

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Buehler; "Comprehensive Test Patterns with Modular Test Structures: The 2 by N Probe Pad Array Approach"; Solid State Technology; Oct. 1979, pp. 89-94.
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Henderson et al.; "Integrated Circuit Test Structure Which Uses a Vernier to Electrically Measure Mask Misalignment"; Electronics Letters; Oct. 13, 1981; vol. 19, No. 21; pp. 868-869.

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