Addition of oxygen to a gas mix for use in an excimer laser

Details Addition of oxygen to a gas mix for use in an excimer laser Addition of oxygen to a gas mix for use in an excimer laser

1993-05-24

1994-04-26

Davie, James W.

Coherent light generators

Particular active media

Gas

372 55, 372 57, H01S 322

Patent

active

053073649

ABSTRACT:
The present invention relates to discovery that oxygen may be used to stabilize the efficiency and performance of an excimer laser. Therefore, oxygen is not a contaminant to be minimized but rather a necessary part of an excimer lasing composition.

REFERENCES:
patent: 4964137 (1971-10-01), Aramaki et al.
patent: 5029178 (1991-07-01), Tarui
patent: 5073896 (1991-12-01), Reid et al.
patent: 5090020 (1992-02-01), Bedwell
patent: 5199267 (1993-04-01), Mitsui

Affiliated with

Also associated with

Rating

Addition of oxygen to a gas mix for use in an excimer laser does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Addition of oxygen to a gas mix for use in an excimer laser, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Addition of oxygen to a gas mix for use in an excimer laser will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1717679