Adding interlock for pause after polyimide coating

Details Adding interlock for pause after polyimide coating Adding interlock for pause after polyimide coating

2005-01-25

2005-01-25

Fiorilla, Chris (Department: 1734)

Coating apparatus

Program, cyclic, or time control

Having timer

C118S699000, C118S703000, C118S707000

Reexamination Certificate

active

06845731

ABSTRACT:
A polyimide processing tool for coating polyimide on a semiconductor wafer is provided with a pause time monitoring means for monitoring the duration of the polyimide processing tool's wafer-transfer robot's pause time. The wafer-transfer robot transfers wafers from polyimide apply tool to polyimide cure bake oven and monitoring the duration of the pause helps prevent undesirably long pauses between polyimide apply of the uncured polyimide and the curing step.

REFERENCES:
patent: 6456364 (2002-09-01), Imai
patent: 20030149506 (2003-08-01), Haanstra et al.

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