Adding energy to a cleaning process fluid for removing photo...

Details Adding energy to a cleaning process fluid for removing photo... Adding energy to a cleaning process fluid for removing photo...

2005-08-30

2005-08-30

Barr, Michael (Department: 1746)

Cleaning and liquid contact with solids

Apparatus

With movable means to cause fluid motion

C134S187000, C134S188000, C366S273000

Reexamination Certificate

active

06935352

ABSTRACT:
A supercritical fluid cleaning system and method comprising mainly a pressure chamber, a closable lid, a substrate support for holding at least one substrate, a rotable shaft extending outward from within the chamber, an external rotary power source coupled magnetically or otherwise to the shaft, and a rotable component or impeller attached to the chamber end of the shaft in close proximity to the substrate holding position, and baffles located close to the rotable component. The rotable component is con|figured for rotation within the supercritical phase fluid in the chamber close to the surface of the wafer for causing agitation and turbulent fluid flow against the surface of the substrate, and increased intra-chamber fluid circulation.

REFERENCES:
patent: 5337446 (1994-08-01), Smith et al.
patent: 5417768 (1995-05-01), Smith et al.
patent: 5509431 (1996-04-01), Smith et al.
patent: 5526834 (1996-06-01), Mielnik et al.
patent: 5698163 (1997-12-01), Mandel
patent: 6067728 (2000-05-01), Farmer et al.
patent: 6277753 (2001-08-01), Mullee et al.
patent: 6602349 (2003-08-01), Chandra et al.
patent: 6736906 (2004-05-01), Cotte et al.
patent: 2002/0086537 (2002-07-01), Mullee et al.
patent: 2003/0116176 (2003-06-01), Rothman et al.
patent: 2004/0003831 (2004-01-01), Mount
patent: WO 03/061860 (2003-07-01), None

Affiliated with

Also associated with

Rating

Adding energy to a cleaning process fluid for removing photo... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Adding energy to a cleaning process fluid for removing photo..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Adding energy to a cleaning process fluid for removing photo... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3519144