Adaptive signature detection

Details Adaptive signature detection Adaptive signature detection

2010-05-28

2011-11-15

Mariam, Daniel (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

Reexamination Certificate

active

08059886

ABSTRACT:
A processor-based method for detecting defects in an integrated circuit, by creating an image of at least a portion of the integrated circuit with a sensor, grouping pixels of the image into bins based at least in part on a common characteristic of the pixels that are grouped within a given bin, creating a histogram of the pixels in each of the bins, calculating a mean value of the histogram for each of the bins, comparing the mean value for each of the bins to a threshold value, flagging as defect candidates those bins where the mean value of the bin varies from the threshold value by more than a predetermined amount, and performing signature detection on the bins that are flagged as defect candidates, where the image of the integrated circuit is not directly compared to any other image of an integrated circuit.

REFERENCES:
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patent: 2006/0071081 (2006-04-01), Wang
patent: 2006/0199287 (2006-09-01), Fu et al.
patent: 2006/0273242 (2006-12-01), Hunsche
patent: 2008/0055591 (2008-03-01), Walton
patent: 2008/0317339 (2008-12-01), Steinberg et al.

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