Adaptive shape substrate support system

Details Adaptive shape substrate support system Adaptive shape substrate support system

2007-12-11

2007-12-11

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S053000, C355S072000, C269S021000

Reexamination Certificate

active

11136891

ABSTRACT:
The present method and system features an active compliant pin chuck to hold a substrate, having opposed first and second surfaces, and compensates for non-planarity in one of the surfaces of the substrate. To that end, the support system includes a chuck having a plurality of piezo pins and reference pins, with the piezo pins being coupled to piezo actuators to undergo relative movement with respect to said reference pins. These and other embodiments are discussed more fully below.

REFERENCES:
patent: 5923408 (1999-07-01), Takabayashi
patent: 6182510 (2001-02-01), Stanke et al.
patent: 6305677 (2001-10-01), Lenz
patent: 6313567 (2001-11-01), Maltabes et al.
patent: 6696220 (2004-02-01), Bailey et al.

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