Electricity: motive power systems – Positional servo systems – Multiple mode systems
Patent
1978-11-15
1980-09-16
Dobeck, B.
Electricity: motive power systems
Positional servo systems
Multiple mode systems
318640, 250201, G05B 1118
Patent
active
042232570
ABSTRACT:
An adaptive position control system including X, Y and .theta. stages and their associated positioning and motion detection apparatus, position detection apparatus for detecting the position of the stages relative to a fixed reference, X and Y position control subsystems responsive to signals developed by the motion and position detection apparatus and operative to generate coarse mode and precision mode drive signals for application to the X and Y stage positioning apparatus, X and Y adjust subsystems for enabling adjustment of the position detection apparatus, and a .theta. adjust subsystem operative in a coarse mode and precision mode for adjusting of the angular orientation of the .theta. stage. Operator control input to the various subsystems is accomplished by means of a joystick control mechanism and central processing unit.
REFERENCES:
patent: 3719879 (1973-03-01), Marcy
patent: 3904945 (1975-09-01), Hassan et al.
patent: 3943359 (1976-03-01), Matsumoto et al.
patent: 4016396 (1977-04-01), Hassan et al.
patent: 4128794 (1978-12-01), Burleson
Dobeck B.
Hamrick Claude A. S.
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