Adaptive-optics actuator arrays and methods for using such...

Details Adaptive-optics actuator arrays and methods for using such... Adaptive-optics actuator arrays and methods for using such...

2006-10-24

2006-10-24

Shafer, Ricky D. (Department: 2872)

Optical: systems and elements

Mirror

Including specified control or retention of the shape of a...

C359S846000, C359S350000, C355S067000, C137S803000

Reexamination Certificate

active

07125128

ABSTRACT:
Actuator arrays for use in adaptive-optical elements and optical systems containing at least one such element are disclosed. The actuator arrays provide more precise control of the shape of the adaptive-optical surface while utilizing fewer actuators than conventional systems. An adaptive-optical system of an embodiment includes an array of force devices coupled to a deformable optical surface. The force devices of the array are arranged in braking groups and force-altering groups such that each force device belongs to a respective combination of braking group and force-altering group. A respective force controller is coupled to the force devices of each force-altering group, and a respective braking controller is coupled to the force devices of each braking group. The force-altering group adjusts as required the respective forces exerted on the optical surface by the force devices of the respective force-altering group, whereas the braking controller when actuated prevents changes in respective forces exerted by the force devices of the respective braking group.

REFERENCES:
patent: 3603671 (1971-09-01), Brown
patent: 3620606 (1971-11-01), Tschunko
patent: 4003640 (1977-01-01), Hansen
patent: 4190327 (1980-02-01), Hughes
patent: 4492431 (1985-01-01), Eitel et al.
patent: 4632523 (1986-12-01), Knohl
patent: 4721376 (1988-01-01), Fushchetto
patent: 4825062 (1989-04-01), Rather et al.
patent: 4923302 (1990-05-01), Ealey et al.
patent: 5151809 (1992-09-01), Meier
patent: 5204784 (1993-04-01), Spinhirne
patent: 5461514 (1995-10-01), Sasaki et al.
patent: 6236490 (2001-05-01), Shen
patent: 2004/0013956 (2004-01-01), Sogard
patent: 1 376 191 (2004-01-01), None
John W. Hardy, “Active Optics: A New Technology for the Control of Light,” IEEE, vol. 66, No. 6, Jun. 1978, pp. 651-697.
Mark A. Ealey, “Active and Adaptive Optical Components: The Technology and Future Trends,” SPIE, vol. 1543, Active and Adaptive Optical Components, 1991, pp. 2-34.
Mark A. Ealey, “Actuators: Design Fundamentals, Key Performance Specifications and Parametric Trades,” SPIE vol. 1543, Active and Adaptive Optical Components, 1991, pp. 346-362.
Mark A. Ealey and John A. Wellman, “Deformable Mirrors: Design Fundamentals, Key Performance Specifications, and Parametric Trades,” SPIE, vol. 1543, Active and Adaptive Optical Components, 1991, pp. 36-51.
Julie A. Perreault et al., “Adaptive Optic Correction Using Microelectromechanical Deformable Mirrors,” Optical Engineering, vol. 41, No. 3, Mar. 2002, pp. 561-566.
D.A. Tichenor et al., “EUV Engineering Test Stand,” 25thAnnual International Symposium on Microlithography, Feb. 14, 2000, 22 pages.
L.C. Hale et al., “High-NA Camera for an EUVL Microstepper,” 15thAnnual American Society for Precision Engineering, Scottsdale, Sep. 1, 2000, 6 pages.

Affiliated with

Also associated with

Rating

Adaptive-optics actuator arrays and methods for using such... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Adaptive-optics actuator arrays and methods for using such..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Adaptive-optics actuator arrays and methods for using such... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3679103