Adaptive mirror assembly

Optical: systems and elements – Mirror – With support

Reexamination Certificate

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Reexamination Certificate

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08079721

ABSTRACT:
A mirror assembly for an optical system of a laser processing machine includes a mount with a cavity, and an adaptive mirror. A magnetorheological or electrorheological fluid flows through the cavity, is adjusted in its viscosity, and provides an adjustable pressure onto the adaptable mirror.

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