Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate
2006-09-05
2006-09-05
Niebling, John F. (Department: 2812)
Semiconductor device manufacturing: process
With measuring or testing
C438S015000, C310S346000
Reexamination Certificate
active
07101721
ABSTRACT:
An adaptive manufacturing process for a Film Bulk Acoustic Resonator (FBAR) tests the FBAR circuit during manufacturing to determine a resonant frequency thereof. Reactive tuning elements may be adjusted as needed depending on the testing to change the resonant frequency to a desired resonant frequency. In an exemplary embodiment, predetermined masks may be applied to modify the tuning elements.
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Dening David
Jorgenson Jon D.
Steel Victor
Luk Olivia T.
Niebling John F.
RF Micro Devices, Inc.
Withrow & Terranova , PLLC
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