Adaptable electrochemical processing chamber

Details Adaptable electrochemical processing chamber Adaptable electrochemical processing chamber

2005-07-12

2005-07-12

King, Roy (Department: 1742)

Electrolysis: processes, compositions used therein, and methods

Electrolytic coating

Controlling current distribution within bath

C205S080000, C205S096000, C205S123000, C205S261000, C205S640000, C205S687000

Reexamination Certificate

active

06916412

ABSTRACT:
An electrochemical processing chamber which can be modified for treating different workpieces and methods for so modifying electrochemical processing chambers. In one particular embodiment, an electrochemical processing chamber200includes a plurality of walls510defining a plurality of electrode compartments520, each electrode compartment having at least one electrode600therein, and a virtual electrode unit530defining a plurality of flow conduits, with at least one of the flow conduits being in fluid communication with each of the electrode compartments. This first virtual electrode unit530may be exchanged for a second virtual electrode unit540, without modification of any of the electrodes600, to adapt the processing chamber200for treating a different workpiece.

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