Actuator to correct for off center-of-gravity line of force

Details Actuator to correct for off center-of-gravity line of force Actuator to correct for off center-of-gravity line of force

2005-01-11

2005-01-11

Lam, Thanh (Department: 2834)

Electricity: motive power systems

Linear-movement motors

C310S012060, C355S053000, C355S072000

Reexamination Certificate

active

06841956

ABSTRACT:
Methods and apparatus for adjusting a push point of an actuator such that the push point more closely corresponds to a center-of-gravity of a stage being driven by the actuator are disclosed. According to one aspect of the present invention, a method for scanning a stage device which includes a stage, as well as an actuator which has a first coil and a second coil, includes driving the stage using the actuator and determining when driving the stage using the actuator includes driving the stage through a first location associated with the stage. The actuator is arranged to drive the stage through a push point associated with the first coil and the second coil. The method also includes altering the push point when it is determined that driving the stage using the actuator does not result in the stage being driven through the first location associated with the stage.

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