Actuator, switch using the actuator, and method of...

Details Actuator, switch using the actuator, and method of... Actuator, switch using the actuator, and method of...

2006-05-02

2009-12-15

Dougherty, Thomas M (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S309000

Reexamination Certificate

active

07633213

ABSTRACT:
An actuator includes a base, an arm having an elastic property and supported by the base, electrostatic-driving electrodes provided on the base and the arm, respectively, and a piezoelectric-driving layer. The piezoelectric-driving layer includes a first electrode layer on the arm, a piezoelectric layer on the first electrode layer, and a second electrode layer on the piezoelectric layer. This actuator can be driven quickly with a low voltage.

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