Actuator, optical scanner and image-forming device

Details Actuator, optical scanner and image-forming device Actuator, optical scanner and image-forming device

2007-09-17

2010-06-08

Cherry, Euncha P (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

Reexamination Certificate

active

07733551

ABSTRACT:
An actuator, includes: a weight part; a supporting part supporting the weight part; a connecting part coupling the weight part rotatable to the supporting part and having an elastic part; a driving member for driving and rotating the weight part; and a semiconductor circuit for driving the weight part. The driving member is operated to torsionally deform the elastic part and rotate the weight part. The elastic part has a first silicon part that is mainly made of silicon and a first resin part that is mainly made of resin and coupled to the first silicon part. The supporting part has at least a second silicon part made mainly of silicon and coupled to the first silicon part of the elastic part. The semiconductor circuit is provided on the second silicon part of the supporting part.

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Paul Horowitz and Winfield Hill, The Art of Electronics, 1989, Cambridge University Press, 2nd edition, p. 596.

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