Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
Reexamination Certificate
2008-03-07
2009-08-04
Cherry, Euncha P (Department: 2872)
Optical: systems and elements
Deflection using a moving element
Using a periodically moving element
Reexamination Certificate
active
07570406
ABSTRACT:
An actuator includes: a first vibration system including a driving member having a frame shape, and a pair of first axial members each one end of which supports the driving member so as to allow the driving member to rotate about an X-axis; a second vibration system including a movable plate provided inside the driving member, and a pair of second axial members each one end of which supports the movable plate so as to allow the movable plate to rotate about a Y-axis perpendicular to the X-axis; a driving unit including a ferromagnetic member, a coil acting a magnetic field on the ferromagnetic member and a voltage applying unit applying a voltage to the coil, either one of the ferromagnetic member and the coil being disposed at a position on the driving member apart from each of the X and Y axes in a plan view of the movable plate; and a positioning portion that is disposed to the driving member and determine a fixing position of the ferromagnetic member or the coil with respect to the driving member. The movable plate rotates about each of the X and Y-axes by the voltage applying unit applying a voltage to the coil.
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Mizoguchi Yasushi
Yamaga Hirokazu
Cherry Euncha P
Harness & Dickey & Pierce P.L.C.
Seiko Epson Corporation
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