Actuator operated microvalves

Details Actuator operated microvalves Actuator operated microvalves

2005-08-26

2008-10-21

Eshete, Zelalem (Department: 3748)

Internal-combustion engines

Poppet valve operating mechanism

Electrical system

C251S011000

Reexamination Certificate

active

07438030

ABSTRACT:
An actuator operated microvalve and the method of making same is disclosed and claimed. The microvalve comprises a SiC housing which includes a first lower portion and a second upper portion. The lower portion of the SiC housing includes a passageway therethrough, a microvalve seat, and a moveable SiC diaphragm. The SiC diaphragm includes a centrally located boss and radially extending corrugations which may be sinusoidally shaped. The boss of the SiC diaphragm moves and modulates in a range of positions between a closed position wherein the boss interengages said microvalve seat prohibiting communication of fluid through the passageway and a fully open position when the boss is spaced apart from the seat at its maximum permitting communication of fluid through said passageway. The actuator includes a SiC top plate affixed to the boss of the diaphragm and a first electrode and the second upper portion of the SiC housing further includes a second electrode.

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