Actuator, its manufacturing method and printing head

Details Actuator, its manufacturing method and printing head Actuator, its manufacturing method and printing head

2006-05-16

2006-05-16

Shah, Manish (Department: 2853)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C347S070000, C347S071000

Reexamination Certificate

active

07044587

ABSTRACT:
An actuator1in which a displacement element7has a piezoelectric ceramic layer4and a pair of electrodes5, 6interposing therebetween the piezoelectric ceramic layer4. The entire thickness of the actuator1is 100 μm or less. The piezoelectric ceramic layer4and the substrate2have as their principal component a perovskite crystal containing at least Pb; Zr and Ti, and, the maximum difference in a composition ratio Pb/(Ti+Zr) between the surface of the piezoelectric ceramic layer4and the inside of the substrate2is 0.02 or less. This reduces characteristic variation.

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patent: 07-315923 (1995-12-01), None
patent: 10-151739 (1998-06-01), None
patent: 11-034321 (1999-02-01), None

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