Actuator having doped silicon arms and method of making the...

Dynamic magnetic information storage or retrieval – Head mounting – For adjusting head position

Reexamination Certificate

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C360S265900, C360S264200

Reexamination Certificate

active

07050271

ABSTRACT:
An actuator to which leads are easily attachable, and a method of making the same are provided. In the actuator in accordance with the present invention, a pair of silicon arms have their resistances lowered by being doped with impurities and are connected to each other by way of a glass substrate. A predetermined surface of each silicon arm is formed with a piezoelectric part, whereas a predetermined surface of the piezoelectric part is formed with a thin-film electrode. Therefore, the piezoelectric part is driven when a voltage is applied between a bonding wire attached to the thin-film electrode and a bonding wire attached to the silicon arm. Since the bonding wire can be attached to the silicon arm at any position thereon, wire bonding can be carried out while appropriately selecting positions and surfaces where the bonding wire is easily attachable.

REFERENCES:
patent: 6163434 (2000-12-01), Zhang
patent: 6555201 (2003-04-01), Dhuler et al.
patent: 6937131 (2005-08-01), Rodgers et al.
patent: 2001/0017750 (2001-08-01), Bonin
patent: 1 225 644 (2002-07-01), None
patent: 1 306 908 (2003-05-01), None
patent: 1 357 611 (2003-10-01), None
patent: A 2001-320103 (2001-11-01), None
patent: A 2002-26411 (2002-01-01), None
patent: A 2002-289936 (2002-10-01), None
patent: A 2003-8093 (2003-01-01), None
patent: WO 01/97296 (2001-12-01), None

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