Actuator for micro-electromechanical system fabry-perot filter

Details Actuator for micro-electromechanical system fabry-perot filter Actuator for micro-electromechanical system fabry-perot filter

2006-08-10

2009-06-23

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

By light interference

Spectroscopy

C358S519000

Reexamination Certificate

active

07551287

ABSTRACT:
According to one embodiment, a micro-electrical mechanical system apparatus includes a bi-stable actuator and at least one movable Fabry-Perot filter cavity mirror coupled to the bi-stable actuator. The bi-stable actuator may be associated with a first latched position and a second latched position and may comprise, for example, a thermal device, an electrostatic device (e.g., a parallel plate or comb drive), or a magnetic device. According to some embodiments, a relationship between a voltage applied to an actuator of a Fabry-Perot filter and an amount of displacement associated with a movable mirror is substantially linear.

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