Actuator device, method of manufacturing the same and...

Details Actuator device, method of manufacturing the same and... Actuator device, method of manufacturing the same and...

2011-08-30

2011-08-30

Do, An H (Department: 2853)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C310S320000

Reexamination Certificate

active

08007080

ABSTRACT:
Provided is an actuator device including a piezoelectric element formed of a lower electrode, a piezoelectric layer, and an upper electrode, and displaceably provided on a substrate with a zirconium oxide layer interposed therebetween, the substrate having a silicon oxide layer formed by thermal oxidation on at least a surface, and an intermediate layer made of at least one material selected from the group consisting of titanium oxide, hafnium oxide, aluminum oxide, calcium oxide, and rare earth oxide, and provided between the silicon oxide layer and the zirconium oxide layer.

REFERENCES:
patent: 5933167 (1999-08-01), Shimada et al.
patent: 6923528 (2005-08-01), Shimada
patent: 2003-110158 (2003-04-01), None
patent: 2005-166719 (2005-06-01), None
patent: 2005-295786 (2005-10-01), None

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