Actuator device, liquid-jet head and liquid-jet apparatus

Details Actuator device, liquid-jet head and liquid-jet apparatus Actuator device, liquid-jet head and liquid-jet apparatus

2007-04-03

2010-06-22

Meier, Stephen D (Department: 2853)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C347S068000

Reexamination Certificate

active

07740345

ABSTRACT:
Disclosed is an actuator device which includes a vibration plate and a piezoelectric element. The vibration plate includes an elastic film which is made of silicon oxide (SiO2) and which is formed on a substrate while the piezoelectric element is formed on the vibration plate and including a lower electrode, a piezoelectric layer and an upper electrode. The vibration plate has such a stress as to give a tensile stress between 300 MPa and 500 MPa, inclusive, to the piezoelectric element that is in a state of being displaced.

REFERENCES:
patent: 2003/0132683 (2003-07-01), Yamada et al.
patent: 2005/0168524 (2005-08-01), Xin-Shan et al.
patent: 2005/0185025 (2005-08-01), Shimada et al.
patent: 2005/0190239 (2005-09-01), Ito et al.
patent: 2008/0034563 (2008-02-01), Xin-Shan et al.
patent: 2000-094681 (2000-04-01), None
patent: 2003-096101 (2003-04-01), None
patent: 2005-144804 (2005-06-01), None
patent: 2005-176433 (2005-06-01), None
patent: 2005-228983 (2005-08-01), None

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