Actuator device and liquid ejecting head

Details Actuator device and liquid ejecting head Actuator device and liquid ejecting head

2007-09-21

2010-12-07

Do, An H (Department: 2853)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

Reexamination Certificate

active

07845772

ABSTRACT:
An actuator device includes a piezoelectric element configured to include a lower electrode provided on a surface side of a substrate, a piezoelectric layer provided on the lower electrode, and an upper electrode provided on the piezoelectric layer. The lower electrode contains a precious metal. When a cross-section of the lower electrode is examined in the thickness direction using secondary ion mass spectroscopy (SIMS), a ratio Z1/Z2between the intensity Z1of oxygen ions and the intensity Z2of ions of a precious metal detected at the surface of the lower electrode facing the substrate is 0.2 or more.

REFERENCES:
patent: 7137179 (2006-11-01), Yokouchi et al.
patent: 7497962 (2009-03-01), Tokunaga
patent: 2005/0167712 (2005-08-01), Kijima et al.
patent: 2005-071945 (2004-03-01), None
patent: 2005-176433 (2005-06-01), None

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