Actuator device

Details Actuator device Actuator device

2006-11-28

2006-11-28

Budd, Mark (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S324000

Reexamination Certificate

active

07141915

ABSTRACT:
An actuator device has a drive section including a plurality of actuators arranged in a plane on a substrate, and a single first plate member to which drive forces from the actuators of the drive section are transmitted. A plurality of spacers are disposed between the first plate member and the substrate, forming m cells. Each of the actuators has a cavity, a vibrating section and a fixed section formed on the substrate. The rigidity of the first plate member is greater than the rigidity of the vibrating section of the actuator.

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