Actuator array and method for the manufacture thereof

Details Actuator array and method for the manufacture thereof Actuator array and method for the manufacture thereof

1994-03-23

1996-08-06

Nelms, David C.

Optical: systems and elements

Optical modulator

Light wave temporal modulation

29 2535, G02F 103

Patent

active

055439594

ABSTRACT:
An array of M.times.N electrodisplacive actuators is prepared by:
(1) forming a multilayered ceramic structure having M layers of a first conductive metallization and M+1 layers of an electrodisplacive material;
(2) obtaining a composite ceramic wafer by slicing the multilayered ceramic structure in a direction normal to the layers of the first conductive metallization;
(3) providing a plurality of regularly spaced horizontally directional trenches running parallel to each other wherein each of the trenches is located at an equidistance from two adjacent layers of the first conductive metallization;
(4) depositing a second conductive metallization;
(5) preparing N-1 regularly spaced vertically directional cuts on the composite ceramic wafer prepared using steps (3) and (4) to thereby obtain the array of M.times.N electrodisplacive actuators.

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