Actuator array and method for the manufacture thereof

Details Actuator array and method for the manufacture thereof Actuator array and method for the manufacture thereof

1996-07-12

1998-06-16

Epps, Georgia Y.

Optical: systems and elements

Optical modulator

Light wave temporal modulation

G02B 2600

Patent

active

057680086

ABSTRACT:
An array of M.times.N electrodisplacive actuators is prepared by:

REFERENCES:
patent: 4932119 (1990-06-01), Ealey et al.
patent: 5124834 (1992-06-01), Cusano et al.

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