Actuator and systems and methods

Details Actuator and systems and methods Actuator and systems and methods

2007-09-25

2007-09-25

Doan, Jennifer (Department: 2874)

Optical waveguides

With optical coupler

Movable coupler

C385S015000, C385S024000

Reexamination Certificate

active

11094411

ABSTRACT:
An actuator system that includes two beams that are formed into a diamond pattern. A crossbar is positioned at a midsection to connect the two beams. When power is applied to the two beams, the diamond pattern is driven vertically. An actuator system may also include a substrate and a first layer above a second layer on the substrate. The first and second layers include upper and lower beams joined together at one end of the layers. A method of forming an actuator system includes forming a first layer above a second layer on a substrate, joining the first and second layers together at one end of the layers, and forming upper and lower beams. The upper and lower beams may be different in width, length and thickness to control a vertical movement of the actuator system.

REFERENCES:
patent: 6804036 (2004-10-01), Chen et al.

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