Actuator and micro-electromechanical system device

Details Actuator and micro-electromechanical system device Actuator and micro-electromechanical system device

2006-12-05

2006-12-05

Dougherty, Tom (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S330000, C310S332000

Reexamination Certificate

active

07145284

ABSTRACT:
An actuator includes a movable beam supported on a substrate by a supporting portion, and having a first movable end and a second movable end. The second movable end is opposite to the first movable end with respect to the supporting portion. A first drive beam is connected to the movable beam at around the second movable end. The first drive beam is fixed on the substrate at an end portion of the first drive beam. A second drive beam is connected to the movable beam at a location between the supporting portion and the first movable end. The second drive beam is fixed on the substrate at another end portion of the second drive beam.

REFERENCES:
patent: 6242989 (2001-06-01), Barber et al.
patent: 6359374 (2002-03-01), Dausch et al.
patent: 6858972 (2005-02-01), Kikuchi et al.
patent: 2003/0179535 (2003-09-01), Shimanouchi et al.
patent: 2005/0128552 (2005-06-01), Yasuda et al.
patent: 8-242592 (1996-09-01), None
patent: 2004-6588 (2004-01-01), None

Affiliated with

Also associated with

Rating

Actuator and micro-electromechanical system device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Actuator and micro-electromechanical system device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Actuator and micro-electromechanical system device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3690347