Actuator

Details Actuator Actuator

2005-09-27

2005-09-27

Donovan, Lincoln (Department: 2832)

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

C200S181000

Reexamination Certificate

active

06949996

ABSTRACT:
A two-dimensional driving actuator comprises a flat spring structure, and a driver for driving the flat spring structure. The flat spring structure includes a moving plate, a moving inner frame surrounding the moving plate, first torsion bars coupling the moving plate and the moving inner frame so as to allow the moving plate to be vibrated relative to the moving inner frame, a fixed outer frame surrounding the moving inner frame, and second torsion bars coupling the moving inner frame and the fixed outer frame so as to allow the moving inner frame to be vibrated relative to the fixed outer frame. The flat spring structure is manufactured from a single semiconductor substrate. The first and second torsion bars are made of different materials.

REFERENCES:
patent: 5629790 (1997-05-01), Neukermans et al.
patent: 5867294 (1999-02-01), Sakai
patent: 5907425 (1999-05-01), Dickensheets et al.
patent: 5912608 (1999-06-01), Asada
patent: 6108118 (2000-08-01), Minamoto
patent: 6188504 (2001-02-01), Murakami et al.
patent: 6467345 (2002-10-01), Neukermans et al.
patent: 2003/0174035 (2003-09-01), Arima
patent: 2004/0075522 (2004-04-01), Kato et al.
patent: 2005/0046504 (2005-03-01), Xiaoyu et al.

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