Actuator

Details Actuator Actuator

2006-10-20

2009-11-24

Cherry, Euncha P (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

Reexamination Certificate

active

07623283

ABSTRACT:
An actuator includes a movable plate, at least one elastic member supporting the movable plate to allow the movable plate to rock, a support holding the elastic member, a wiring layer extending on the elastic member, and a protective film covering the wiring layer. The protective film is of a resin.

REFERENCES:
patent: 6188504 (2001-02-01), Murakami et al.
patent: 6813049 (2004-11-01), Miyajima et al.

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