Actuation microsystem and method of producing same

Details Actuation microsystem and method of producing same Actuation microsystem and method of producing same

2008-01-28

2010-11-16

Mai, Anh T (Department: 2832)

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

C200S181000

Reexamination Certificate

active

07834723

ABSTRACT:
The actuation microsystem is produced on a flat substrate and comprises a pivoting arm mounted in rotation around a hinge, a stationary contact pad arranged on the substrate, and an end of opening travel stop of the pivoting arm. The end of travel stop comprises a top part, for example a head, arranged above and at a distance from the pivoting arm between an articulation end and a free end of the pivoting arm. The stop comprises a bottom part arranged laterally with respect to the pivoting arm, between the hinge and the stationary contact pad, and formed for example by a foot comprising a support pad formed on the substrate, a pedestal extending the support pad and a support portion of the head.

REFERENCES:
patent: 2709791 (1955-05-01), Anderson, Jr.
patent: 6373007 (2002-04-01), Calcatera et al.
patent: 6418081 (2002-07-01), Sen et al.
patent: 6570750 (2003-05-01), Calcatera et al.
patent: 6734770 (2004-05-01), Aigner et al.
patent: 6750745 (2004-06-01), Wei et al.
patent: 6828888 (2004-12-01), Iwata et al.
patent: 2003/0173957 (2003-09-01), Shen et al.
patent: 2003/0179058 (2003-09-01), Vaitkus et al.
patent: 2005/0001701 (2005-01-01), Shirakawa
patent: 2005/0083156 (2005-04-01), Shen et al.
Hou M. et al., “Effect of Width on the Stress-Induced Bending of Micromachined Bilayer Cantilevers,” 2003, J. Micromech. Microeng. vol. 13, pp. 141-148.
Lee S. et al., “Curled Micro-Cantilevers Using Benzocyclobutene Polymer and Mo for Wafer Level Probing,” 2005, Sensors and Actuators, vol. 121, pp. 472-479.

Affiliated with

Also associated with

Rating

Actuation microsystem and method of producing same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Actuation microsystem and method of producing same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Actuation microsystem and method of producing same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4172812