Actuating and sensing device for scanning probe microscopes

Details Actuating and sensing device for scanning probe microscopes Actuating and sensing device for scanning probe microscopes

2006-05-30

2006-05-30

Larkin, Daniel S. (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

C250S306000

Reexamination Certificate

active

07051582

ABSTRACT:
An actuating and sensing device for scanning probe microscopes includes a tuning fork (21) containing two prongs, a connection device (23) such as a spring, and a probing tip (22). The tip (22) is connected to both prongs of the tuning fork (21) with the connection device (23). The tuning fork (21) is used as a mechanical resonator to vibrate. The movements of the prongs are transformed via the connection device (23) into movements of the tip (22), wherein the tip movements can be in different planes than the movement plane of the prongs.

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“Resonant Sensors by Silicon Micromachining”, Proceedings of the 1996 IEEE International Frequency Control Symposium, Jun. 5, 1996.

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