Actuated mirror having an increased tilting angle

Details Actuated mirror having an increased tilting angle Actuated mirror having an increased tilting angle

1997-06-27

1998-09-08

Epps, Georgia Y.

Optical: systems and elements

Optical modulator

Light wave temporal modulation

559850, G02B 2600, G02B 7182

Patent

active

058053310

ABSTRACT:
An inventive array of thin film actuated mirrors is provided with an active matrix, an array of actuating structures and an array of thin film mirrors, wherein the actuating structure is provided with a pair of side actuators and the center actuator, both ends of the side actuators being fixed to the active matrix, the upper thin film electrode of the side actuator electrically being connected to the lower thin film electrode of the center actuator to thereby function as a common bias electrode, the lower thin film electrode of the side actuator being connected to the upper thin film electrode of the center actuator to thereby function as a signal electrode. When the electric field is applied in the thin film actuated mirror, the side actuator expands and the center actuator contracts upward, allowing the thin film actuated mirror to tilt an increased angle. Each of the thin film mirrors is cantilevered at a distal end of the center actuator in each of the actuating structures.

REFERENCES:
patent: 5606452 (1997-02-01), Min
patent: 5610773 (1997-03-01), Min

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