Actuated mirror array with active matrix substrate having array

Details Actuated mirror array with active matrix substrate having array Actuated mirror array with active matrix substrate having array

1994-05-04

1997-10-28

Shafer, Ricky D.

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

359291, 359295, 359855, 310328, 310366, G02B 508, G02B 2608, H04R 1700, H01L 4104

Patent

active

056822600

ABSTRACT:
An M.times.N actuated mirror array for use in an optical projection system, wherein M and N are integers, including: an array of M.times.N electrodisplacive actuators wherein each of the M.times.N electrodisplacive actuators is provided with a top surface, a bottom surface, a pair of external sides and has a bimorph structure having a pair of layers of an electrodisplacive material, a common signal electrode located between the pair of layers of the electrodisplacive material, and a pair of reference electrodes provided on the external sides thereof an array of M.times.N mirrors wherein each of M.times.N mirrors is coupled with each of the M.times.N electrodisplacive actuators and is mounted on the top surface of each of the M.times.N actuators an active matrix substrate comprising a substrate and an array of M.times.N second conductive type MOSFETs formed on the substrate; and an array of M.times.N connecting terminals wherein each of the M.times.N connecting terminals, located between each of the actuators and the substrate, is used for electrically connecting the common signal electrode of each of the actuators with each of the MOSFETs.

REFERENCES:
patent: 5083856 (1992-01-01), Hornbeck
patent: 5144472 (1992-09-01), Sang, Jr. et al.
patent: 5172262 (1992-12-01), Hornbeck
patent: 5233456 (1993-08-01), Nelson
patent: 5469302 (1995-11-01), Lim
patent: 5506720 (1996-04-01), Yoon
patent: 5552923 (1996-09-01), Min
patent: 5585956 (1996-12-01), Lee et al.

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