Actuated mirror array for use in optical projection system

Details Actuated mirror array for use in optical projection system Actuated mirror array for use in optical projection system

1994-05-04

1998-01-13

Shafer, Ricky D.

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

359291, 359295, 359855, 310328, 310366, G02B 508, G02B 2608, H01L 4104, H04R 1700

Patent

active

057085218

ABSTRACT:
An M.times.N actuated mirror array for use in an optical projection system, comprises:

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