Actuated mirror array and method for the manufacture thereof

Details Actuated mirror array and method for the manufacture thereof Actuated mirror array and method for the manufacture thereof

1995-04-25

1997-03-11

Wambach, Margaret Rose

Optical: systems and elements

Mirror

Plural mirrors or reflecting surfaces

359295, 359851, 353 99, 353 38, G02B 508, G03B 2128, G03B 2114

Patent

active

056107730

ABSTRACT:
An array of M.times.N thin film actuated mirrors for use in an optical projection system comprises an active matrix, an array of M.times.N supporting members, M.times.N trinities of first, second and third conduits and an array of M.times.N thin film actuating structures. Each of the actuating structures includes a first, an electrodisplacive and a second layers, wherein the first and seconds layers are placed on top and bottom of the electrodisplacive layer. In each of the actuated mirrors, the first layer therein is connected, individually and electrically, to a conduction line pattern through the second and the third conduits, thereby acting as bias electrode and the second layer is connected electrically to one of the transistors included in through the first conduit to thereby act as a signal electrode.

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