Actuated mirror array and method for the fabricating thereof

Details Actuated mirror array and method for the fabricating thereof Actuated mirror array and method for the fabricating thereof

1994-08-31

2000-05-09

Spyrou, Cassandra

Optical: systems and elements

Mirror

Plural mirrors or reflecting surfaces

359872, 359220, 359223, 359224, 359226, G02B 508

Patent

active

060594160

ABSTRACT:
Fabrication and mounting of an array of M.times.N mirrors on an array of M.times.N electrodisplacive actuators is carried out by one of the two inventive methods, comprising the steps of: patterning a substrate into an array of M.times.N protrusions; forming subsequently a separation layer, a first, a second and a third metallic layers on a top of the array of M.times.N protrusions; bonding the array of M.times.N actuators on the protrusions; disengaging the array of M.times.N protrusions from an array of M.times.N mirror bodies by removing the separation layer; and forming a fourth metallic layer on the first metallic layer so as to provide the reflector to thereby provide the array of M.times.N actuated mirrors. The other method comprises the steps of: clamping physically a thin glass on a top surface of a substrate; plating a top surface of the thin glass with a bonding layer; bonding the array of M.times.N actuators on a top surface of the bonding layer and removing a portions of the bonding layer which is not connected with a top surface of the array of M.times.N actuators; forming a metallic layer on the thin glass; patterning the metallic layer into the array of M.times.N mirrors; cutting a portion of the thin glass which is not contacted with the array of M.times.N mirror to thereby provide the array of M.times.N actuated mirror.

REFERENCES:
patent: 3886310 (1975-05-01), Guldberg et al.
patent: 4592628 (1986-06-01), Altman et al.
patent: 5212582 (1993-05-01), Nelson

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