Active wafer level contacting system

Details Active wafer level contacting system Active wafer level contacting system

1996-11-12

1999-05-11

Brown, Glenn W.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324754, 438 14, G01R31/26

Patent

active

059031646

ABSTRACT:
Apparatus for use in testing a semiconductor device located on a wafer. The apparatus includes a wafer body. A device contact region is located on the wafer body. Further, an active component region is coupled to the device contact region. A mechanism is provided for coupling the active component region to a remote testing device. The active component region may include test signal conditioning circuits and device testing circuits. The active component region may be formed integral the wafer body by silicon wafer processing techniques, such as silicon doping.

REFERENCES:
patent: 5070297 (1991-12-01), Kwon et al.
patent: 5140405 (1992-08-01), King et al.
patent: 5266890 (1993-11-01), Kumbasar et al.
patent: 5532610 (1996-07-01), Tsujide et al.
patent: 5701666 (1997-12-01), DeHaven et al.

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