Active thermal control system with miniature liquid-cooled...

Details Active thermal control system with miniature liquid-cooled... Active thermal control system with miniature liquid-cooled...

2008-04-08

2008-04-08

Karlsen, Ernest (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C165S080400

Reexamination Certificate

active

07355428

ABSTRACT:
A temperature control system, which includes a miniature liquid-cooled heat sink, is used to provide a controlled temperature surface to an electronic device, such as a semiconductor device, during the testing or burn-in phase. In one embodiment, the system includes a miniature liquid-cooled heat sink device having a monolithic counter-flowing structure. In other embodiments, the system includes a heater, a flow control valve, a controller, and/or sensors.

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