Active sensor for micro force measurement

Details Active sensor for micro force measurement Active sensor for micro force measurement

2008-05-06

2008-05-06

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Dynamometers

Responsive to force

C073S862634, C073S862639, C073S104000, C073S105000, C073S579000

Reexamination Certificate

active

07367242

ABSTRACT:
An active micro-force sensor is provided for use on a micromanipulation device. The active micro-force sensor includes a cantilever structure having an actuator layer of piezoelectric material and a sensing layer of piezoelectric material bonded together. When an external force is exerted on the sensor, the sensor deforms and an applied force signal is recorded by the sensing layer. The applied force signal is then fed back to the actuating layer of the sensor via a servoed transfer function or servo controller, so that a counteracting deformation can be generated by the bending moment from the servoed actuating layer to quickly balance the deformation caused by the external micro-force. Once balanced, the sensor beam comes back to straight status and the tip will remain in its equilibrium position, thus the sensor stiffness seems to be virtually improved so that the accurate motion control of the sensor tip can be reached, especially, at the same time, the micro-force can also be obtained by solving the counteracting balance voltage applied to the actuating layer.

REFERENCES:
patent: 4588975 (1986-05-01), Roloff et al.
patent: 6035694 (2000-03-01), Dupuie et al.
patent: 6510738 (2003-01-01), Lee et al.
patent: 6668627 (2003-12-01), Lange et al.
patent: 6720712 (2004-04-01), Scott et al.
patent: 7134349 (2006-11-01), Xi et al.
patent: 2002/0089259 (2002-07-01), Iino et al.
patent: 2002/0089916 (2002-07-01), Lee et al.
patent: 2005/0034543 (2005-02-01), Xi et al.
patent: 8-262039 (1996-10-01), None
Qiangxian Huang et al, “Surface Topographic Measurement Using Piezoelectrical PVDF film Stylus”, Transactions of the Institute of Electrical Engineers of Japan, PartC Inst. Electr. Eng. Japan, vol. 123-C, No. 3, Mar. 2003, pp. 505-510.
Yantano Shen et al., “Contact and Force Control in Microassembly”, Proceedings of the 5th IEEE International Symposium on Assembly NAD task planning, Besancon, France, Jul. 10, 2003, pp. 60-65.
Shan-Min Swei et al., “On Improving Head-disk Interface in Hard Dis Drives Using Active Control”, Proceedings of the 39th IEEE Conference on Decision and Contro, Sidney, Australia, vol. 4, Dec. 12, 2000, pp. 3106-3111.
Y. Shen et al, “A High Sensitivity Force Sensor for Microassembly: Design and Experiments”. Proceedings of the IEEE/ASME International Conference on Advanced Intelligent Mechatronics, vol. 2, pp. 703-708, Jul. 20-24, 2003.
C.K.M. Fung et al, “A 2-D PVDF Force Sensing System for Micro-Manipulation and Micro-assembly”, Proceedings ICRA '02. IEEE International Conference on Robotics and Automation, vol. 2, pp. 1489-1494, May 11-15, 2002.
C.K.M. Fung et al, “Internet-Based Remote Sensing and Manipulation in Micor Environment”, Proceedings of 2001 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, vol. 2, pp. 695-700, Jul. 8-12, 2001.
Yu Sung et al, “Actively Servoed Multi-Axis Microforce Sensors”, Proceedings of the 2003 IEEE/ASME International Conference on Robotics & Automation, pp. 294-299, Sep. 14-19, 2003.
Young-Sup Lee et al, “Matched Piezoelectric Double Sensor/Actuator Pairs For Beam Motion Control”, Institute of Physics Publishing, Smart Materials and Structures 12, pp. 541-548, Jun. 25, 2003.
Marc S. Weinberg, “Working Equations For Piezoelectric Actuators and Sensors”, Journal of Microelectromechanical Systems, vol. 8, No. 4, pp. 529-533 Dec. 1999.
Paolo Gaudenzi et al, “Control of Beam Vibrations By Means of Piezoelectric Devices: Theory and Experiments”, Elsevier Science, Ltd., Composite Structures 50, pp. 373-379, 2000.
Forouza Pourki, “Distributed Controllers For Flexible Structures Using Piezo-Electric Actuator/Sensors”, Proceedings of the 32ndConference on Decision and Control, pp. 1367-1370 Dec. 1993.
T.E. Alberts et al, “Experimental Verification of Transfer Functions For a Slewing Piezoelectric Laminate Beam”, Control Engineering Practice, vol. 3. No. 2., pp. 163-170, 1995.
S.O. Reza Moheimani, “Experimental Verification of the Corrected Transfer Function of a Piezoelectric Laminate Beam”, Proceedings of the IEEE International Conference on Transactions on Control Systems Technology, vol. 8, No. 4, Jul. 2000.
Don DeVoe et al, “Modeling and Optimal Design of Piezoelectric Cantilever Microactuators”, Journal of Microelectromechanical Systems, vol. 6, No. 3, Sep. 1997.
Edward F. Crawley et al, “Use of Piezoelectric Actuators as Elements of Intelligent Structures”, Presented as Paper 86-0878 at the AIAA/ASME/ASCE/AHS 27thStructures, Structural Dynamics and Materials Conference, vol. 25, No. 10, May 19-21, 1986.
Thomas Bailey et al, “Distributed Piezoelectric-Polymer Active Vibration Control of a Cantilever Beam”, American Institute of Aeronautics and Astronautics, Inc., vol. 8, No. 5, Sep.-Oct. 1985.
Domenico Campolo et al, “Development of Piezoelectric Bending Actuators with Embedded Piezoelectric Sensors for Micromechanical Flapping Mechanisms”, Proceedings of the IEEE International Conference, pp. 3339-3346, 2003.
Ellad B.Tadmor et al, “Electromechanical Coupling Correction For Piezoelectric Layered Beams”, Journal of Microelectromechanical Systems, vol. 12, No. 6, Dec. 2003.

Affiliated with

Also associated with

Rating

Active sensor for micro force measurement does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Active sensor for micro force measurement, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Active sensor for micro force measurement will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2809540