Active mirror assembly

Details Active mirror assembly Active mirror assembly

1990-03-01

1992-10-27

Arnold, Bruce Y.

Optical: systems and elements

Mirror

Including specified control or retention of the shape of a...

359 11, 359291, 359900, 356353, G02B 718, G02B 112, G01B 902

Patent

active

051594986

ABSTRACT:
A mirror and system for wavefront control includes a piezoelectrically active pellicle with a conductive front mirror surface, and an electron gun for depositing charge on the rear surface of the pellicle. The pellicle is formed of facing plies of polyvinylidene fluoride having opposite poling, so that efficient bimorph actuation is achieved while maintaining substantially constant pellicle thickness and stable x-y planar position coordinates. A phase corrector plate provides a fixed flatness correction for irregularities of the mirror surface, and an initial charge distribution is applied to achieve a reference mirror contour. Potentials above and below a front surface reference potential, and different frame rates, are achieved by controlling the electron energy to selectively charge by primary or secondary charging processes. A feedback system may establish the initial reference contour, and thereafter effect real time wavefront adjustment of a beam reflected from the front mirror surface.

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