Active mirror

Details Active mirror Active mirror

1999-03-19

2001-02-27

Nguyen, Thong (Department: 2872)

Optical: systems and elements

Mirror

Including specified control or retention of the shape of a...

C359S224200

Reexamination Certificate

active

06193381

ABSTRACT:

CROSS-REFERENCES TO RELATED APPLICATIONS
Not applicable
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT
Not applicable
BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention relates to an active mirror with a reflectively coated diaphragm, a mount, and at least one actuator.
2. Discussion of Relevant Art
Such mirrors are known, for example, from U.S. Pat. No. 5,204,784 and German Patent DE 35 02 024 C2. The known actuators specify that the actuator(s) is/are supported against rigid structures. A diaphragm is understood to be a thin, flat structure, the flexural strength of which is small as against its tensile strength, such as are provided as a deformable mirror element in the above-mentioned documents.
Such active mirrors find application, for example, as laser mirrors and as a portion of microlithography projection devices, and also, for example, in astronomical telescopes.
SUMMARY OF THE INVENTION
The invention has as its object an active mirror for the highest precision requirements, in particular as regards the constancy of the vertex position of the mirror, and thus minimizing decentering, defocusing, and tilting.
The solution is attained according to the invention by an active mirror of the given category having a reflectively coated diaphragm, a mount, a second diaphragm connected to the mount, and at least one actuator that is operatively connected to the reflectively coated diaphragm and the second diaphragm. By fastening the actuators to a second diaphragm as a support, the deformation of the reflectively coated diaphragm proceeds from an established fixed reference base.
Particularly for arrangements with several actuators, advantageous features of the invention reduce the introduction of moments or lateral thrust, which are produced by the extension or contraction of the diaphragm with a fixed support. The introduction of moments or lateral thrust are particularly minimized by the symmetry of the two diaphragms.
Ball joints that support the actuators on the two diaphragms are also an advantageous feature of the invention for undisturbed deformation, since the introduction of bending moments is prevented. Another advantageous feature of the invention is that the mount includes a pillar that is situated on the optical axis A of the active mirror and connects the reflectively coated diaphragm to the second diaphragm.


REFERENCES:
patent: 3620606 (1971-11-01), Tschunko
patent: 4422723 (1983-12-01), Williams, Jr. et al.
patent: 4655563 (1987-04-01), Plante et al.
patent: 4657358 (1987-04-01), Anthony et al.
patent: 5016998 (1991-05-01), Butler et al.
patent: 5204784 (1993-04-01), Spinhrine
patent: 35 02 024 C2 (1985-01-01), None

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