Active matrix substrate having benzocyclobutene-containing inter

Details Active matrix substrate having benzocyclobutene-containing inter Active matrix substrate having benzocyclobutene-containing inter

1997-05-29

1999-06-29

Dang, Hung Xuan

Liquid crystal cells, elements and systems

Particular structure

Having significant detail of cell structure only

349122, G02F 11333

Patent

active

059175710

ABSTRACT:
An active matrix substrate of the present invention includes: an insulating substrate; scanning bus lines and signal bus lines provided on the insulating substrate so as to cross each other; switching elements provided in the vicinity of crossing portions of the scanning bus lines and the signal bus lines. The active matrix substrate also includes an interlayer insulating film covering the switching elements, the scanning bus lines and the signal bus lines; and pixel electrodes provided on the surface of the interlayer insulating film opposite to the insulating substrate, each of the pixel electrodes being electrically connected with each of the switching elements via a contact hole penetrating the interlayer insulating film. The interlayer insulating film includes a first layer containing benzocyclobutene and a second layer containing silicon dioxide obtained by treating the surface of the first layer with oxygen plasma.

REFERENCES:
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patent: 5641974 (1997-06-01), den Boer et al.
patent: 5721601 (1998-02-01), Yamaji et al.
Hirohisa, Patent Abstract Active Matrix Substrate, (04068318 A) Mar. 4, 1992.
Kenichi, Patent Abstract Active Matrix Substrate (04163528 A) Jun. 9, 1992.
Perettie, et al. Benzocyclobutene as a Planarization Overcoat for Flat Panel Displays. Asia Display, vol. 721, 1995, 721-724.

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