Active matrix substrate, electromagnetic detector, and...

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Amorphous semiconductor material

Reexamination Certificate

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Details

C257S072000, C250S267000, C250S265000, C349S199000, C349S158000

Reexamination Certificate

active

06891194

ABSTRACT:
An electromagnetic detector includes an insulating substrate, whereon a charge storage capacitor, a charge collection electrode connected to the charge storage capacitor, and a semiconductor film having electromagnetic conductivity are laminated in this order. The charge collection electrode has an uneven section composed of at least a concave or convex part, dedicated for use in reinforcing a bonding strength between the semiconductor film and the charge collection electrode. With this structure, a peeling of the semiconductor film can be prevented.

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Lee et al; “New digital detector for projection radiography”1995; SPIE vol. 2432, pp. 237-249.*
Lee et al, “A New Digital Detector Projection Radiograpy”, SPIE, vol. 2432, pp. 237-249, May 1995.
Boer et al, “Thin Film Transistor array technology for high performance, direct conversion X-ray sensors”, SPIE, vol. 3336, Medical Imaging 1998, pp. 520-528, May 1998.

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