Active matrix substrate and manufacturing method of the same

Liquid crystal cells – elements and systems – Particular excitation of liquid crystal – Electrical excitation of liquid crystal

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349139, 257 59, G02F 1136, G02F 11343, H10L 2904, H10L 31036

Patent

active

058185496

ABSTRACT:
First and second gate insulating films, a semiconductor layer made of a-Si(i), and an etching stopper layer are formed to cover a gate electrode on a glass substrate. A drain electrode side contact layer and a source electrode side contact layer are made out of a-Si(n.sup.+) in such a manner to be cut off on the etching stopper layer. A disconnection preventing a-Si(n.sup.+) wire is formed below a source wire in its longitudinal direction, and atop of which a pixel electrode is formed. Since the disconnection preventing a-Si(n.sup.+) wire and source electrode side contact layer are spaced apart, static-induced characteristics deterioration of TFT and the point and line defects during the substrate fabrication sequence can be eliminated and the non-defective ratio of the display device can be improved drastically.

REFERENCES:
patent: 5021850 (1991-06-01), Tanaka et al.
patent: 5187602 (1993-02-01), Ikeda et al.
patent: 5446562 (1995-08-01), Sato et al.
patent: 5539551 (1996-07-01), Nomoto et al.
patent: 5668650 (1997-09-01), Mori et al.

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