Active matrix substrate, a manufacturing method of the...

Details Active matrix substrate, a manufacturing method of the... Active matrix substrate, a manufacturing method of the...

2008-01-08

2008-01-08

Le, Dung A. (Department: 2818)

Semiconductor device manufacturing: process

Bonding of plural semiconductor substrates

Subsequent separation into plural bodies

C438S459000, C438S508000

Reexamination Certificate

active

11052766

ABSTRACT:
A manufacturing method of a thin film apparatus, includes: a first step for forming a separation layer on a heat resistant substrate; a second step for forming a thin film device on the separation layer; a third step for providing a surface layer on the thin film device; and a fourth step for generating a peeling phenomenon at the interface of the separation layer and the heat resistant substrate so as to peel the heat resistant substrate from a side of the thin film device.

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