Active matrix substrate

Stock material or miscellaneous articles – Structurally defined web or sheet – Discontinuous or differential coating – impregnation or bond

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Details

361311, 3613212, 361322, 428210, 428469, 428472, 428697, 428699, 428701, 428702, H01B 312

Patent

active

053689151

ABSTRACT:
An active matrix substrate comprising storage capacitors each having an insulating film formed of a single perovskite oxide or a solid solution composed of a plurality of the perovskite oxides. Since the perovskite oxide has a significantly high relative dielectric constant, the area of storage capacitor can be reduced while keeping or increasing the capacitance thereof. Further, the insulating film can be thickened as far as the insulation property thereof is not affected without the capacitance thereof being reduced, thereby preventing leakage current.

REFERENCES:
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patent: 4260663 (1981-04-01), Hagemann et al.
patent: 4309295 (1982-01-01), McSweeny
patent: 4367265 (1983-01-01), Yu et al.
patent: 4490429 (1984-12-01), Tosaki et al.
patent: 5139856 (1992-08-01), Takeuchi et al.
Schwarz et al "Vacuum Deposition by High energy Laser with emphasis on Barium Titanate films" 1969, Jour. of Vacuum Sci & Tech vol. 6, No. 3 pp. 373-378.

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